LOW-COST HIGH-PURITY VACUUM PUMPS AND SYSTEMS

Disclosed is a pumping system with reduced contamination. A vacuum pump system includes a mechanical vacuum pump mechanism within a hermetic pump that hermetically isolates the pump mechanism from ambient air. A pump inlet is hermetically sealed to the hermetic pump housing. A pump outlet is hermeti...

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Bibliographische Detailangaben
1. Verfasser: WOODARD, Nathan
Format: Patent
Sprache:eng ; fre
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