APPARATUS FOR PROCESSING A WAFER

An apparatus for processing a wafer, the apparatus comprising: a rotatable chuck for receiving and rotating a wafer; a heating device arranged to heat a wafer received by the rotatable chuck; a plate that is transparent to radiation emitted by the heating device; and a plate holder that holds an out...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	BRUGGER, Michael, PUTZI, Christian, PUGGL, Michael
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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