ALKALI-SOLUBLE RESIN, PHOTOSENSITIVE RESIN COMPOSITION, PHOTOSENSITIVE ELEMENT, METHOD OF FORMING RESIST PATTERN, AND METHOD OF FORMING WIRING PATTERN

Alkali-soluble resin comprises a structural unit having a polarity converting group and a structural unit having a carboxy group, wherein the polarity converting group has a group being not eliminated under weak alkaline conditions but being eliminated under strong alkaline conditions. La résine sol...

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Bibliographische Detailangaben
Hauptverfasser:	MURAKAMI, Yasuharu, MA, Xiao-dong, TANIMOTO, Akitoshi, KATO, Sadaaki, JIANG, Xuesong
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CHEMISTRY CINEMATOGRAPHY COMPOSITIONS BASED THEREON ELECTROGRAPHY HOLOGRAPHY MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVINGCARBON-TO-CARBON UNSATURATED BONDS MATERIALS THEREFOR METALLURGY ORGANIC MACROMOLECULAR COMPOUNDS ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS THEIR PREPARATION OR CHEMICAL WORKING-UP
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Beschreibung
Zusammenfassung:	Alkali-soluble resin comprises a structural unit having a polarity converting group and a structural unit having a carboxy group, wherein the polarity converting group has a group being not eliminated under weak alkaline conditions but being eliminated under strong alkaline conditions. La résine soluble dans les alcalis comprend une unité structurale ayant un groupe de conversion de polarité et une unité structurale ayant un groupe carboxy, le groupe de conversion de polarité ayant un groupe n'étant pas éliminé dans des conditions alcalines faibles mais étant éliminé dans des conditions alcalines fortes.