METHOD OF MANUFACTURING A SUBSTRATE SUPPORT FOR A ITHOGRAPHIC APPARATUS, SUBSTRATE TABLE, LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD, METHOD OF USE

The disclosure relates to substrate tables and methods of manufacturing substrate supports for substrate tables. In one arrangement, a plurality of holes are formed through a base member. A burl formation member is joined to the base member. A plurality of burl structures are formed in the burl form...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	TEN KATE, Nicolaas, STEUR, Michael, WINKELS, Koen, TROMP, Siegfried, DE GROOT, Antonius
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES
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