METHOD OF MANUFACTURING A SUBSTRATE SUPPORT FOR A ITHOGRAPHIC APPARATUS, SUBSTRATE TABLE, LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD, METHOD OF USE

The disclosure relates to substrate tables and methods of manufacturing substrate supports for substrate tables. In one arrangement, a plurality of holes are formed through a base member. A burl formation member is joined to the base member. A plurality of burl structures are formed in the burl form...

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Bibliographische Detailangaben
Hauptverfasser:	TEN KATE, Nicolaas, STEUR, Michael, WINKELS, Koen, TROMP, Siegfried, DE GROOT, Antonius
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	The disclosure relates to substrate tables and methods of manufacturing substrate supports for substrate tables. In one arrangement, a plurality of holes are formed through a base member. A burl formation member is joined to the base member. A plurality of burl structures are formed in the burl formation member. Each burl structure comprises a distal surface that contacts, in use, a substrate being supported. Each burl structure comprises an opening to at least one of the holes formed through the base member. L'invention concerne des tables de substrat et des procédés de fabrication de supports de substrat pour des tables de substrat. Dans un agencement, une pluralité de trous sont formés dans un élément de base. Un élément de formation de burl est relié à l'élément de base. Une pluralité de structures de burl sont formées dans l'élément de formation de burl. Chaque structure de burl comprend une surface distale qui entre en contact, lors de l'utilisation, avec un substrat supporté. Chaque structure de burl comprend une ouverture sur au moins l'un des trous formés dans l'élément de base.