SYSTEM AND METHOD FOR PROTECTING OPTICS FROM VACUUM ULTRAVIOLET LIGHT

A system for mitigating damage to optical elements caused by vacuum ultraviolet (VUV) light exposure is disclosed. The system includes a light source configured to generate VUV and a chamber containing one or more gaseous fluorine-based compounds of a selected partial pressure. The system includes o...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	DELGADO, Gildardo, LIKHANSKI, Serguei, BUTAEVA, Evgeniia, SAVEE, John, DERSTINE, Matthew
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS
Online-Zugang:	Volltext bestellen
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