PROBE SYSTEMS INCLUDING IMAGING DEVICES WITH OBJECTIVE LENS ISOLATORS, AND RELATED METHODS

Probe systems including imaging devices with objective lens isolators and related methods are disclosed herein. A probe system includes an enclosure with an enclosure volume for enclosing a substrate that includes one or more devices under test (DUTs), a testing assembly, and an imaging device. The...

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Bibliographische Detailangaben
Hauptverfasser:	NEGISHI, Kazuki, GISLER, Gerald Lee, HUANG, Yu-Wen, CHRISTENSON, Eric Robert, SIMMONS, Michael E
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	ACCESSORIES THEREFOR APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USINGWAVES OTHER THAN OPTICAL WAVES APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FORPROJECTING OR VIEWING THEM BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHOTOGRAPHY PHYSICS SEMICONDUCTOR DEVICES TESTING
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