TRENCH CAPACITOR AND TRENCH CAPACITOR PRODUCTION METHOD

Provided are a trench capacitor and a trench capacitor production method which can achieve a reduction in the equivalent series resistance. This trench capacitor 1 is provided with: a base material 10 which has a trench 11 extending in the vertical direction from a top surface 10a; and an MIM struct...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	AOYAGI Yoshio, SUEMASA Riki
Format:	Patent
Sprache:	eng ; fre ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS CAPACITORS CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES ORLIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE ELECTRICITY
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