PATTERNED X-RAY EMITTING TARGET
The present invention is intended to provide improved patterned X-ray emitting targets as well as X-ray sources that include patterned X-ray emitting targets as well as X-ray reflectance scatterometry (XRS) systems and also including X-ray photoelectron spectroscopy (XPS) systems and X-ray fluoresce...
Gespeichert in:
| Hauptverfasser: | , , |
|---|---|
| Format: | Patent |
| Sprache: | eng ; fre |
| Schlagworte: | |
| Online-Zugang: | Volltext bestellen |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| container_end_page | |
|---|---|
| container_issue | |
| container_start_page | |
| container_title | |
| container_volume | |
| creator | REED, David. A NEWCOME, Bruce H SCHUELER, Bruno W |
| description | The present invention is intended to provide improved patterned X-ray emitting targets as well as X-ray sources that include patterned X-ray emitting targets as well as X-ray reflectance scatterometry (XRS) systems and also including X-ray photoelectron spectroscopy (XPS) systems and X-ray fluorescence (XRF) systems which employ such X-ray emitting targets.
L'objet de la présente invention est de fournir des cibles d'émission de rayons X à motifs améliorées ainsi que des sources de rayons X qui comprennent des cibles d'émission de rayons X à motifs de même que des systèmes de diffusiométrie de réflectance de rayons X (XRS) et comprenant également des systèmes de spectroscopie photoélectronique de rayons X (XPS) et des systèmes de fluorescence de rayons X (XRF) qui utilisent de telles cibles d'émission de rayons X. |
| format | Patent |
| fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_WO2021079307A1</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>WO2021079307A1</sourcerecordid><originalsourceid>FETCH-epo_espacenet_WO2021079307A13</originalsourceid><addsrcrecordid>eNrjZJAPcAwJcQ3yc3VRiNANcoxUcPX1DAnx9HNXCHEMcncN4WFgTUvMKU7lhdLcDMpuriHOHrqpBfnxqcUFicmpeakl8eH-RgZGhgbmlsYG5o6GxsSpAgBfFiKU</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>PATTERNED X-RAY EMITTING TARGET</title><source>esp@cenet</source><creator>REED, David. A ; NEWCOME, Bruce H ; SCHUELER, Bruno W</creator><creatorcontrib>REED, David. A ; NEWCOME, Bruce H ; SCHUELER, Bruno W</creatorcontrib><description>The present invention is intended to provide improved patterned X-ray emitting targets as well as X-ray sources that include patterned X-ray emitting targets as well as X-ray reflectance scatterometry (XRS) systems and also including X-ray photoelectron spectroscopy (XPS) systems and X-ray fluorescence (XRF) systems which employ such X-ray emitting targets.
L'objet de la présente invention est de fournir des cibles d'émission de rayons X à motifs améliorées ainsi que des sources de rayons X qui comprennent des cibles d'émission de rayons X à motifs de même que des systèmes de diffusiométrie de réflectance de rayons X (XRS) et comprenant également des systèmes de spectroscopie photoélectronique de rayons X (XPS) et des systèmes de fluorescence de rayons X (XRF) qui utilisent de telles cibles d'émission de rayons X.</description><language>eng ; fre</language><subject>BASIC ELECTRIC ELEMENTS ; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ; ELECTRICITY</subject><creationdate>2021</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20210429&DB=EPODOC&CC=WO&NR=2021079307A1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20210429&DB=EPODOC&CC=WO&NR=2021079307A1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>REED, David. A</creatorcontrib><creatorcontrib>NEWCOME, Bruce H</creatorcontrib><creatorcontrib>SCHUELER, Bruno W</creatorcontrib><title>PATTERNED X-RAY EMITTING TARGET</title><description>The present invention is intended to provide improved patterned X-ray emitting targets as well as X-ray sources that include patterned X-ray emitting targets as well as X-ray reflectance scatterometry (XRS) systems and also including X-ray photoelectron spectroscopy (XPS) systems and X-ray fluorescence (XRF) systems which employ such X-ray emitting targets.
L'objet de la présente invention est de fournir des cibles d'émission de rayons X à motifs améliorées ainsi que des sources de rayons X qui comprennent des cibles d'émission de rayons X à motifs de même que des systèmes de diffusiométrie de réflectance de rayons X (XRS) et comprenant également des systèmes de spectroscopie photoélectronique de rayons X (XPS) et des systèmes de fluorescence de rayons X (XRF) qui utilisent de telles cibles d'émission de rayons X.</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS</subject><subject>ELECTRICITY</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2021</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZJAPcAwJcQ3yc3VRiNANcoxUcPX1DAnx9HNXCHEMcncN4WFgTUvMKU7lhdLcDMpuriHOHrqpBfnxqcUFicmpeakl8eH-RgZGhgbmlsYG5o6GxsSpAgBfFiKU</recordid><startdate>20210429</startdate><enddate>20210429</enddate><creator>REED, David. A</creator><creator>NEWCOME, Bruce H</creator><creator>SCHUELER, Bruno W</creator><scope>EVB</scope></search><sort><creationdate>20210429</creationdate><title>PATTERNED X-RAY EMITTING TARGET</title><author>REED, David. A ; NEWCOME, Bruce H ; SCHUELER, Bruno W</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_WO2021079307A13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; fre</language><creationdate>2021</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS</topic><topic>ELECTRICITY</topic><toplevel>online_resources</toplevel><creatorcontrib>REED, David. A</creatorcontrib><creatorcontrib>NEWCOME, Bruce H</creatorcontrib><creatorcontrib>SCHUELER, Bruno W</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>REED, David. A</au><au>NEWCOME, Bruce H</au><au>SCHUELER, Bruno W</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>PATTERNED X-RAY EMITTING TARGET</title><date>2021-04-29</date><risdate>2021</risdate><abstract>The present invention is intended to provide improved patterned X-ray emitting targets as well as X-ray sources that include patterned X-ray emitting targets as well as X-ray reflectance scatterometry (XRS) systems and also including X-ray photoelectron spectroscopy (XPS) systems and X-ray fluorescence (XRF) systems which employ such X-ray emitting targets.
L'objet de la présente invention est de fournir des cibles d'émission de rayons X à motifs améliorées ainsi que des sources de rayons X qui comprennent des cibles d'émission de rayons X à motifs de même que des systèmes de diffusiométrie de réflectance de rayons X (XRS) et comprenant également des systèmes de spectroscopie photoélectronique de rayons X (XPS) et des systèmes de fluorescence de rayons X (XRF) qui utilisent de telles cibles d'émission de rayons X.</abstract><oa>free_for_read</oa></addata></record> |
| fulltext | fulltext_linktorsrc |
| identifier | |
| ispartof | |
| issn | |
| language | eng ; fre |
| recordid | cdi_epo_espacenet_WO2021079307A1 |
| source | esp@cenet |
| subjects | BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY |
| title | PATTERNED X-RAY EMITTING TARGET |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2024-12-25T18%3A08%3A16IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=REED,%20David.%20A&rft.date=2021-04-29&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3EWO2021079307A1%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true |