CELL FOR MEASURING CONCENTRATION OF ADDITIVE BREAKDOWN PRODUCTION IN PLATING SOLUTION

Provided are a measurement method, an electrochemical measuring cell, and a measuring device which are capable of directly and continuously measuring the concentration of monovalent copper ions (Cu+), 3-mercaptopropyl sulfonate (MPS), or Cu+-MPS, which is a plating additive breakdown product, in a p...

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Bibliographische Detailangaben
Hauptverfasser: LEE, Joo-yul, CHOE, Seung-hoe, LEE, Kyu-hwan, KIM, Man, HAN, Myeongjin, KWAN, Younghwon, YOO, Bung-uk
Format: Patent
Sprache:eng ; fre
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Beschreibung
Zusammenfassung:Provided are a measurement method, an electrochemical measuring cell, and a measuring device which are capable of directly and continuously measuring the concentration of monovalent copper ions (Cu+), 3-mercaptopropyl sulfonate (MPS), or Cu+-MPS, which is a plating additive breakdown product, in a plating solution during a copper plating process. Sont divulgués un procédé de mesure, une cellule de mesure électrochimique et un dispositif de mesure qui sont capables de mesurer directement et en continu la concentration d'ions de cuivre monovalents (Cu+), 3-mercaptopropyl sulfonate (MPS), ou Cu+-MPS, qui est un produit de rupture additive de placage, dans une solution de placage pendant un procédé de placage de cuivre.