LOAD LOCK DEVICE

A load lock device that comprises a load lock chamber that has a first transfer port that connects to a transfer chamber that is connected to a depressurization processing device and a second transfer port that connects to a loader chamber, a substrate holder that holds a substrate inside the load l...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	FUKUDA, Naoya, TAKAGI, Shinji, MIURA, Jun, NEGISHI, Satoshi, SOEDA, Junya, KUMAGAI, Shuji, SHIMOKAWA, Hidetoshi, NOMURA, Satoshi, TODA, Tetsuro
Format:	Patent
Sprache:	eng ; fre ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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