SYSTEMS AND METHODS FOR A LIFT AND ROTATE WAFER HANDLING PROCESS

SYSTEMS AND METHODS FOR A LIFT AND ROTATE WAFER HANDLING PROCESS

Various embodiments of a mechanical assembly for linear and rotational handling of electronic wafer substrates under high vacuum are disclosed herein. L'invention concerne divers modes de réalisation d'un ensemble mécanique pour la manipulation linéaire et rotative de substrats de tranche...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: FORGEY, Christian K, TRANG, Brendan V, RIOS REYES, Juan M, LARIVIERE, Marc A, CORRERA, Michael S
Format: Patent
Sprache:eng ; fre
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:Various embodiments of a mechanical assembly for linear and rotational handling of electronic wafer substrates under high vacuum are disclosed herein. L'invention concerne divers modes de réalisation d'un ensemble mécanique pour la manipulation linéaire et rotative de substrats de tranche électronique sous vide poussé.