SEMICONDUCTOR DEVICE INSPECTION METHOD AND SEMICONDUCTOR DEVICE INSPECTION DEVICE

This semiconductor device inspection method comprises: a step for detecting light from a plurality of positions in a semiconductor device D, and acquiring a waveform corresponding to each of the plurality of positions; a step for extracting a waveform corresponding to a specific timing from the wave...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	TERADA Hirotoshi, IWAKI Yoshitaka
Format:	Patent
Sprache:	eng ; fre ; jpn
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS TESTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!