CLEANING AND POLISHING FLUID AND METHOD OF USING

Cleaning and polishing fluids are described. In particular, cleaning and polishing fluids that include water, polymer, and a silicate are described. These cleaning and polishing fluids exhibit good performance, particularly when used with an abrasive pad in a cleaning process. L'invention conce...

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Bibliographische Detailangaben
Hauptverfasser: GUAY, Matthew P, HAGEN, Sarah L, BAI, Feng
Format: Patent
Sprache:eng ; fre
Schlagworte:
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