CLEANING AND POLISHING FLUID AND METHOD OF USING

Cleaning and polishing fluids are described. In particular, cleaning and polishing fluids that include water, polymer, and a silicate are described. These cleaning and polishing fluids exhibit good performance, particularly when used with an abrasive pad in a cleaning process. L'invention conce...

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Bibliographische Detailangaben
Hauptverfasser: GUAY, Matthew P, HAGEN, Sarah L, BAI, Feng
Format: Patent
Sprache:eng ; fre
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Beschreibung
Zusammenfassung:Cleaning and polishing fluids are described. In particular, cleaning and polishing fluids that include water, polymer, and a silicate are described. These cleaning and polishing fluids exhibit good performance, particularly when used with an abrasive pad in a cleaning process. L'invention concerne des fluides de nettoyage et de polissage. En particulier, l'invention concerne des fluides de nettoyage et de polissage qui contiennent de l'eau, un polymère et un silicate. Ces fluides de nettoyage et de polissage présentent de bonnes performances, en particulier lorsqu'ils sont utilisés avec un tampon abrasif dans un procédé de nettoyage.