RF COMPONENTS WITH CHEMICALLY RESISTANT SURFACES

Described herein are RF components with a modified surface material to improve chemical resistance and decrease metal contamination within processing chambers. Also disclosed herein are methods of manufacturing and using the same. Some embodiments of the disclosure comprise a base material with a Yo...

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Bibliographische Detailangaben
Hauptverfasser:	JANAKIRAMAN, Karthik, SOMMERS, Joseph F, SRINIVASAN, Swaminathan, SUBRAMANI, Anantha K
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	Described herein are RF components with a modified surface material to improve chemical resistance and decrease metal contamination within processing chambers. Also disclosed herein are methods of manufacturing and using the same. Some embodiments of the disclosure comprise a base material with a Young's modulus greater than or equal to 75 GPa. Some embodiments of the disclosure have a modified surface material comprising one or more of aluminum, lanathanum and magnesium. L'invention concerne des composants RF avec un matériau de surface modifié pour améliorer la résistance chimique et réduire la contamination métallique dans des chambres de traitement. L'invention concerne également des procédés de fabrication et d'utilisation de ceux-ci. Certains modes de réalisation de l'invention comprennent un matériau de base ayant un module de Young supérieur ou égal À 75 GPa. Certains modes de réalisation de l'invention comportent un matériau de surface modifié comprenant un ou plusieurs éléments parmi l'aluminium, le lanthane et le magnésium.