DEFECT CANDIDATE GENERATION FOR INSPECTION

Systems and methods for detecting defect candidates on a specimen are provided. One method includes, after scanning of at least a majority of a specimen is completed, applying one or more segmentation methods to at least a substantial portion of output generated during the scanning thereby generatin...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	JANI, Mohit, MAHER, Christopher, UPPALURI, Prasanti, PLIHAL, Martin, SOLTANMOHAMMADI, Erfan
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	CALCULATING COMPUTING COUNTING IMAGE DATA PROCESSING OR GENERATION, IN GENERAL INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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