SEALING DEVICE, COMPONENT AND LITHOGRAPHY APPARATUS

Sealing device (300) for sealing a first component part (202) of a lithography apparatus (100A, 100B) vis-a-vis a multiplicity of second component parts (206) of the lithography apparatus (100A, 100B), comprising a multiplicity of sealing rings (302), and a multiplicity of connection locations (304)...

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Bibliographische Detailangaben
Hauptverfasser:	FLUEGGE, Ole, BADER, Dieter, OSTENDORF, Alexander
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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Beschreibung
Zusammenfassung:	Sealing device (300) for sealing a first component part (202) of a lithography apparatus (100A, 100B) vis-a-vis a multiplicity of second component parts (206) of the lithography apparatus (100A, 100B), comprising a multiplicity of sealing rings (302), and a multiplicity of connection locations (304), wherein the sealing rings (302) are connected to one another with the aid of the connection locations (304). Dispositif d'étanchéité (300) pour sceller une première partie de composant (202) d'un appareil de lithographie (100A, 100B) vis-a-vis d'une multiplicité de secondes parties de composant (206) de l'appareil de lithographie (100A, 100B), comprenant une pluralité d'anneaux d'étanchéité (302), et une pluralité d'emplacements de raccordement (304), les anneaux d'étanchéité (302) étant reliés ensemble à l'aide des emplacements de raccordement (304).