FIXTURE FOR AUTOMATIC CALIBRATION OF SUBSTRATE TRANSFER ROBOT

A robot calibration system includes a calibration fixture configured to be mounted on a substrate processing chamber. The calibration fixture includes at least one camera arranged to capture an image including an outer edge of a test substrate and an edge ring surrounding the test substrate. A contr...

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Bibliographische Detailangaben
Hauptverfasser:	THAULAD, Peter, BLANK, Richard, BEHZIZ, Behnam, ALWAN, Aravind, EMERSON, Mark E
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	BASIC ELECTRIC ELEMENTS CHAMBERS PROVIDED WITH MANIPULATION DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HAND TOOLS MANIPULATORS MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PERFORMING OPERATIONS PHYSICS PORTABLE POWER-DRIVEN TOOLS SEMICONDUCTOR DEVICES TESTING TRANSPORTING
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Beschreibung
Zusammenfassung:	A robot calibration system includes a calibration fixture configured to be mounted on a substrate processing chamber. The calibration fixture includes at least one camera arranged to capture an image including an outer edge of a test substrate and an edge ring surrounding the test substrate. A controller is configured to receive the captured image, analyze the captured image to measure a distance between the outer edge of the test substrate and the edge ring, calculate a center of the test substrate based on the measured distance, and calibrate a robot configured to transfer substrate to and from the substrate processing chamber based on the calculated center of the test substrate. L'invention concerne un système d'étalonnage de robot comprenant un appareil d'étalonnage conçu pour être monté sur une chambre de traitement de substrat. L'appareil d'étalonnage comprend au moins une caméra agencée pour capturer une image comprenant un bord externe d'un substrat de test et un anneau de bord entourant le substrat de test. Un dispositif de commande est configuré pour recevoir l'image capturée, analyser l'image capturée pour mesurer une distance entre le bord externe du substrat de test et l'anneau de bord, calculer un centre du substrat de test sur la base de la distance mesurée, et étalonner un robot conçu pour transférer un substrat vers et à partir de la chambre de traitement de substrat sur la base du centre calculé du substrat de test.