VACUUM VALVE

The present invention is configured such that, when a fluid discharge part is open, a shutter member rotates and is positioned at the lower part of a sealing member so as to cover an exposed part of a sealing ring, and the present invention thereby has the benefit of securing reliability for sealing...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: JIN, Ji Hye, JEONG, Gyu Jae
Format: Patent
Sprache:eng ; fre ; kor
Schlagworte:
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Beschreibung
Zusammenfassung:The present invention is configured such that, when a fluid discharge part is open, a shutter member rotates and is positioned at the lower part of a sealing member so as to cover an exposed part of a sealing ring, and the present invention thereby has the benefit of securing reliability for sealing of a vacuum valve by preventing damage to the sealing ring due to a processing by-product such as a particle even if the sealing ring is exposed to a fluid transport part as the fluid discharge part is open for an air cleaning operation. L'invention est conçue de sorte que, lorsqu'une partie d'évacuation de fluide est ouverte, un élément obturateur tourne et soit positionné au niveau de la partie inférieure d'un élément d'étanchéité de manière à recouvrir une partie exposée d'une bague d'étanchéité et la présente invention présente ainsi l'avantage de garantir la fiabilité d'étanchéité d'une soupape à vide en empêchant une détérioration de la bague d'étanchéité due à un sous-produit de traitement tel qu'une particule, même si la bague d'étanchéité est exposée à une partie de transport de fluide lorsque la partie d'évacuation de fluide est ouverte pour une opération de purification de l'air. 본 발명은 유체배출부가 개방된 상태에서 셔터부재가 회전하여 밀폐부재의 하부에 위치되어 밀폐링의 노출부위를 감싸도록 구성함으로써, 공기 세정작업을 위해 유체배출부가 개방된 상태가 되어 밀폐링이 유체이동부에 노출되어 있어도 파티클 등의 공정부산물에 의해 밀폐링이 손상되는 것을 방지하여 진공밸브의 밀폐에 대한 신뢰성을 확보할 수 있다는 장점이 있다.