APPARATUS FOR AND METHOD OF CONTROLLING DROPLET GENERATOR PERFORMANCE

Apparatus for and method of controlling formation of droplets used to generate EUV radiation. The droplet source includes a fluid exiting an nozzle and a sub-system having an electro-actuatable element producing a disturbance in the fluid. The droplet source produces a stream that breaks down into d...

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Bibliographische Detailangaben

Hauptverfasser:	BEYHAGHI, Pooriya, ROLLINGER, Bob
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY X-RAY TECHNIQUE
Online-Zugang:	Volltext bestellen
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