ONE-COMPONENT POLISHING SLURRY COMPOSITION AND POLISHING METHOD USING SAME

The present invention relates to a one-component polishing slurry composition and a polishing method using same and, more specifically, to a one-component polishing slurry composition and a polishing method using same, the one-component polishing slurry composition comprising: abrasive particles; an...

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Bibliographische Detailangaben
Hauptverfasser:	KONG, Hyun Goo, HWANG, In Seol, HWANG, Jin Sook
Format:	Patent
Sprache:	eng ; fre ; kor
Schlagworte:	ADHESIVES BASIC ELECTRIC ELEMENTS CHEMISTRY DYES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FORELSEWHERE METALLURGY MISCELLANEOUS APPLICATIONS OF MATERIALS MISCELLANEOUS COMPOSITIONS NATURAL RESINS PAINTS POLISHES POLISHING COMPOSITIONS OTHER THAN FRENCH POLISH SEMICONDUCTOR DEVICES SKI WAXES
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Beschreibung
Zusammenfassung:	The present invention relates to a one-component polishing slurry composition and a polishing method using same and, more specifically, to a one-component polishing slurry composition and a polishing method using same, the one-component polishing slurry composition comprising: abrasive particles; and a polishing selectivity regulator, wherein the polishing selectivity regulator provides a change in the polishing selectivity of non-Prestonian behavior according to polishing pressure. La présente invention concerne une composition de suspension de polissage à un composant et un procédé de polissage l'utilisant et, plus spécifiquement, une composition de suspension de polissage à un composant et un procédé de polissage l'utilisant, la composition de suspension de polissage à un composant comprenant : des particules abrasives; et un régulateur de sélectivité de polissage, le régulateur de sélectivité de polissage fournissant un changement de la sélectivité de polissage d'un comportement non prestonien en fonction de la pression de polissage. 본 발명은, 일액형 연마 슬러리 조성물 및 이를 이용한 연마 방법에 관한 것으로, 보다 구체적으로, 연마 입자; 및 연마 선택비 조절제;를 포함하고, 상기 연마 선택비 조절제는, 연마 압력에 따라 비-프레스토니안(non-Prestonian) 거동의 연마 선택비 변화를 제공하는 것인, 일액형 연마 슬러리 조성물 및 이를 이용한 연마 방법에 관한 것이다.