WAFER DE-CHUCKING DETECTION AND ARCING PREVENTION

Methods and systems of detection of wafer de-chucking in a semiconductor processing chamber are disclosed. Methods and systems of interdiction are also disclosed to prevent hardware and wafer damage during semiconductor fabrication if and when de-chucking is detected. In one embodiment, a de-chuckin...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	MUNGEKAR, Hemant, YOON, Byung Chul, BALASUBRAMANIAN, Ganesh
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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