COMBUSTIBLE GAS SENSOR

A combustible gas sensor that includes a reference sensor. The reference sensor includes a first substrate having a first substrate first surface, a first insulating layer disposed on the first substrate first surface, and a first heater at least one of embedded within the first insulating layer and...

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Bibliographische Detailangaben
Hauptverfasser:	POTASEK, David P, FOLLETT, Gary, SANKARRAJ, Anand Venkatesh, BACKMAN, Roger Alan, EVJU, Jon K, NGUYEN, Thi A, WEI, Siqi
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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Beschreibung
Zusammenfassung:	A combustible gas sensor that includes a reference sensor. The reference sensor includes a first substrate having a first substrate first surface, a first insulating layer disposed on the first substrate first surface, and a first heater at least one of embedded within the first insulating layer and disposed on the first insulating layer. The first substrate is a MEMS substrate. Capteur de gaz combustible qui comprend un capteur de référence. Le capteur de référence comprend un premier substrat possédant une première surface de premier substrat, une première couche isolante disposée sur la première surface du premier substrat, et un premier élément chauffant intégré dans la première couche isolante et/ou disposé sur la première couche isolante. Le premier substrat est un substrat MEMS.