METHOD FOR MANUFACTURING MOLYBDENUM-CONTAINING THIN FILM AND MOLYBDENUM-CONTAINING THIN FILM MANUFACTURED THEREBY

The present invention provides a method for manufacturing a molybdenum-containing thin film and a molybdenum-containing thin film manufactured thereby. By using a molybdenum (0)-based hydrocarbon compound and a predetermined reaction gas, the method for manufacturing a molybdenum-containing thin fil...

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Bibliographische Detailangaben
Hauptverfasser:	JEON, Sang Yong, KIM, Myong Woon, SEO, Jang Woo, LIM, Haeng Don, LEE, Sang Ick
Format:	Patent
Sprache:	eng ; fre ; kor
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	The present invention provides a method for manufacturing a molybdenum-containing thin film and a molybdenum-containing thin film manufactured thereby. By using a molybdenum (0)-based hydrocarbon compound and a predetermined reaction gas, the method for manufacturing a molybdenum-containing thin film according to the present invention enables easy manufacturing of a highly pure thin film in a simple process. La présente invention concerne un procédé de fabrication d'un film mince contenant du molybdène et un film mince contenant du molybdène ainsi fabriqué. En utilisant un composé hydrocarboné à base de molybdène (0) et un gaz de réaction prédéfini, le procédé de fabrication d'un film mince contenant du molybdène selon la présente invention permet la fabrication aisée d'un film mince très pur dans un processus simple. 본 발명은 몰리브덴 함유 박막의 제조방법 및 이로부터 제조된 몰리브덴 함유 박막을 제공하는 것으로, 본 발명의 몰리브덴 함유 박막의 제조방법은 몰리브덴(0)계 탄화수소 화합물 및 특정한 반응가스를 이용함으로써 순도 높은 박막을 간단한 공정으로 용이하게 제조할 수 있다.