REMOVING METAL CONTAMINATION FROM SURFACES OF A PROCESSING CHAMBER

A method for cleaning surfaces of a substrate processing chamber includes a) supplying a first gas selected from a group consisting of silicon tetrachloride (SiCU4), carbon tetrachloride (CCI4), a hydrocarbon (CxHy where x and y are integers) and molecular chlorine (CI2), boron trichloride (BCI3), a...

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Hauptverfasser:	HEO, Seongjun, YUAN, Ge, YU, Jengyi, KANAKASABAPATHY, Siva Krishnan, TAN, Samantha SiamHwa
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	CHEMISTRY METALLURGY METALLURGY OF IRON PROCESSING OF PIG-IRON, e.g. REFINING, MANUFACTURE OFWROUGHT-IRON OR STEEL TREATMENT IN MOLTEN STATE OF FERROUS ALLOYS
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