SEMICONDUCTOR DEVICE

A semiconductor device, provided with: a semiconductor substrate (10) having a first main surface (11) and a second main surface (12) opposite each other, a measurement pad being disposed on the first main surface (11); and a stress film (20) disposed on the first main surface (11) and/or the second...

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Bibliographische Detailangaben
Hauptverfasser:	KUMAKURA Hiromichi, YOSHIE Toru, WASHIYA Satoru, TANAKA Yuki, SHIKAUCHI Hiroshi
Format:	Patent
Sprache:	eng ; fre ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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