MULTI-STAGE VACUUM EQUIPMENT WITH STAGES SEPARATION CONTROLLED BY SHAPE MEMORY ALLOY ACTUATOR

The present invention relates to a multi-stage vacuum equipment, preferably a two-stage equipment, whose normal operation requires different pressures to be set, wherein the pressure variation may be achieved by a Shape Memory Alloy (SMA) wire movement of a suitable element. The invention further di...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	URBANO, Marco
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
Online-Zugang:	Volltext bestellen
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