VIBRATION ISOLATION SYSTEM AND LITHOGRAPHIC APPARATUS

VIBRATION ISOLATION SYSTEM AND LITHOGRAPHIC APPARATUS

The invention provides a vibration isolation system (IS), comprising a piston (402) to carry a payload, a connecting member (410), a spring (404) and a flexible member (408). The spring is arranged to support the piston along a direction with a positive stiffness. The flexible member is arranged to...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: VERMEULEN, Johannes, JACOBS, Roy, DE HOON, Cornelius, STARREVELD, Jeroen
Format: Patent
Sprache:eng ; fre
Schlagworte:
APPARATUS SPECIALLY ADAPTED THEREFOR
BLASTING
CINEMATOGRAPHY
ELECTROGRAPHY
ENGINEERING ELEMENTS AND UNITS
GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS
HEATING
HOLOGRAPHY
LIGHTING
MATERIALS THEREFOR
MEANS FOR DAMPING VIBRATION
MECHANICAL ENGINEERING
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
SHOCK-ABSORBERS
SPRINGS
THERMAL INSULATION IN GENERAL
WEAPONS
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Beschreibung
Zusammenfassung:The invention provides a vibration isolation system (IS), comprising a piston (402) to carry a payload, a connecting member (410), a spring (404) and a flexible member (408). The spring is arranged to support the piston along a direction with a positive stiffness. The flexible member is arranged to apply a force to the piston along the direction via the connecting member with a negative stiffness. L'invention concerne un système d'isolation des vibrations (IS), comprenant un piston (402) pour porter une charge utile, un élément de liaison (410), un ressort (404) et un élément flexible (408). Le ressort est agencé pour supporter le piston le long d'une direction avec une rigidité positive. L'élément flexible est conçu pour appliquer une force au piston le long de la direction par l'intermédiaire de l'élément de liaison avec une rigidité négative.