HEATING DEVICE FOR HEATING OBJECT MATERIAL USING LASER BEAM AND INDIRECT HEATING METHOD USING LASER BEAM

A heating device for heating an object material by using a laser beam comprises: a stage on which the object material is placed; a laser module for generating and outputting a laser beam; an optical module for controlling a path of the laser beam; a polygon mirror rotating around a rotating shaft an...

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Bibliographische Detailangaben
1. Verfasser:	RYU, Jeong Do
Format:	Patent
Sprache:	eng ; fre ; kor
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY DEVICES USING STIMULATED EMISSION ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	A heating device for heating an object material by using a laser beam comprises: a stage on which the object material is placed; a laser module for generating and outputting a laser beam; an optical module for controlling a path of the laser beam; a polygon mirror rotating around a rotating shaft and having a plurality of reflection surfaces for reflecting the laser beam; and a beam guide module for controlling an incident range in which the laser beam reflected by the polygon mirror enters the object material. L'invention concerne un dispositif de chauffage pour chauffer un matériau objet à l'aide d'un faisceau laser comprenant : un étage sur lequel le matériau objet est placé ; un module laser pour générer et délivrer en sortie un faisceau laser ; un module optique pour commander un trajet du faisceau laser ; un miroir polygonal tournant autour d'un arbre rotatif et ayant une pluralité de surfaces de réflexion pour réfléchir le faisceau laser ; et un module de guidage de faisceau pour commander une plage d'incidence dans laquelle le faisceau laser réfléchi par le miroir polygonal entre dans le matériau objet. 레이저 빔을 이용하여 대상 물질을 가열하는 가열 장치는 상기 대상 물질이 재치되는 스테이지, 레이저 빔을 발생하여 출력하는 레이저 모듈, 상기 레이저 빔의 경로를 제어하는 광학 모듈, 회전축을 중심으로 회전하며 상기 레이저 빔을 반사하는 복수의 반사면을 가지는 폴리곤 미러 및 상기 폴리곤 미러에 의해 반사된 레이저 빔이 상기 대상 물질에 입사되는 입사 범위를 제어하는 빔 가이드 모듈을 포함한다.