LANTHANOID COMPOUND, LANTHANOID-CONTAINING THIN FILM AND FORMATION OF LANTHANOID-CONTAINING THIN FILM USING THE LANTHANOID COMPOUND

To provide a lanthanoid compound for forming a lanthanoid-containing thin film that has high stability and a melting point lower than the use temperature, and therefore can be used in a liquid state; and a film formation process. SOLUTION TO THE PROBLEM: The lanthanoid compound according to the pres...

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Hauptverfasser:	DUSSARAT, Christian, SEKI, Tomohiro, ONO, Takashi
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAININGELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN,SULFUR, SELENIUM OR TELLURIUM BASIC ELECTRIC ELEMENTS CHEMISTRY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY METALLURGY ORGANIC CHEMISTRY SEMICONDUCTOR DEVICES
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