LASER-RELEASABLE BONDING MATERIALS FOR 3-D IC APPLICATIONS
Novel thermoplastic polyhydroxyether-based compositions for use as a laser-releasable composition for temporary bonding and laser debonding processes are provided. The inventive compositions can be debonded using various UV lasers, leaving behind little to no debris. The layers formed from these com...
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Format: | Patent |
Sprache: | eng ; fre |
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