CARRIER FOR USE IN A VACUUM CHAMBER, SYSTEM FOR TESTING A TRANSPORT ARRANGEMENT IN A VACUUM CHAMBER, VACUUM PROCESSING SYSTEM, AND METHOD FOR TESTING A TRANSPORT ARRANGEMENT IN A VACUUM CHAMBER

CARRIER FOR USE IN A VACUUM CHAMBER, SYSTEM FOR TESTING A TRANSPORT ARRANGEMENT IN A VACUUM CHAMBER, VACUUM PROCESSING SYSTEM, AND METHOD FOR TESTING A TRANSPORT ARRANGEMENT IN A VACUUM CHAMBER

The present disclosure provides a carrier (100) for transportation in a vacuum chamber (302). The carrier (100) includes a body (110) and one or more motion sensors (120) connected to the body (110). La présente invention concerne un support (100) pour transport dans une chambre sous vide (302). Le...

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Bibliographische Detailangaben
Hauptverfasser: GERHARD, Marko, ZENGEL, Claus, CHOI, Won Jun, HANDT, Hans Joachim, LAU, Simon, SONNENSCHEIN, Joachim, OSMANLIC, Alen, HANSEN, Hauke
Format: Patent
Sprache:eng ; fre
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:The present disclosure provides a carrier (100) for transportation in a vacuum chamber (302). The carrier (100) includes a body (110) and one or more motion sensors (120) connected to the body (110). La présente invention concerne un support (100) pour transport dans une chambre sous vide (302). Le support (100) comprend un corps (110) et un ou plusieurs capteurs de mouvement (120) reliés au corps (110).