INSTALLATION DEVIATION CALIBRATION METHOD FOR INTERFEROMETER IN MULTI-AXIS LASER DISPLACEMENT MEASUREMENT SYSTEM

An installation deviation calibration method for an interferometer in a multi-axis laser displacement measurement system, comprising: adding one or more redundant interferometers (4) in a laser interferometer displacement measurement system; then establishing displacement calculating equations conta...

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Bibliographische Detailangaben
Hauptverfasser:	ZHU, Yu, CHENG, Rong, YANG, Kaiming, DU, Shengwu, HU, Jinchun, ZHANG, Ming, YIN, Wensheng, SHANG, Enyao
Format:	Patent
Sprache:	chi ; eng ; fre
Schlagworte:	MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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Beschreibung
Zusammenfassung:	An installation deviation calibration method for an interferometer in a multi-axis laser displacement measurement system, comprising: adding one or more redundant interferometers (4) in a laser interferometer displacement measurement system; then establishing displacement calculating equations containing installation deviation of the laser interferometer and obtaining redundant measurement information by continuously measuring displacement information of multiple position points, wherein the number of the combined displacement calculating equations is equal to an unknown quantity; and further solving the equation set to obtain the installation deviation of the interferometer. By adopting a redundant arrangement of the laser interferometer, self-calibration of the installation deviation thereof can be realized. The problem of difficult calibration of the installation deviation of the multi-axis interferometer in industrial application can be solved without assistance of other displacement sensors with higher p