APPARATUS FOR TREATING OBJECT TO BE TREATED

An apparatus for treating an object to be treated according to the present invention comprises: a chamber having an internal space, the pressure of which can be reduced, the chamber being configured such that a plasma treatment is performed on an object to be treated in the internal space; a first e...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KAGAMI Tsuyoshi, FUKUMOTO Hidenori
Format:	Patent
Sprache:	eng ; fre ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY PLASMA TECHNIQUE PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS SEMICONDUCTOR DEVICES
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