SUBSTRATE HOLDER FOR USE IN A LITHOGRAPHIC APPARATUS

A substrate holder for use in a lithographic apparatus and configured to support a substrate, the substrate holder comprising a main body having a main body surface, a plurality of main burls projecting from the main body surface, wherein each main burl has a distal end surface configured to support...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	ROSET, Niek, VERMEULEN, Marcus, VAN DEN BERKMORTEL, Frank, KRAMER, Gijs, BAGGEN, Mark, RAVENSBERGEN, Simon, TIMMERMANS, Roger
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES
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