MASK CASSETTE AND MASK

A mask cassette (100), comprising: a cassette body (10); at least one slot (20) formed in the cassette body (10) and used for placement of a mask (200); and stop blocks (2) provided at the periphery of the slot (20) and used for limiting two ends of the mask (200) placed in the slot (20), wherein on...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	YANG, Chengfa, LIN, Zhiming, BAIYIN, Bili, LI, Dongwei, ZHANG, Jian, HUANG, Chun Chieh, WANG, Qi, HAO, Zhiyuan
Format:	Patent
Sprache:	chi ; eng ; fre
Schlagworte:	ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS,e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES,DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS CONVEYING DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HANDLING THIN OR FILAMENTARY MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY PACKAGES PACKAGING ELEMENTS PACKING PERFORMING OPERATIONS SEMICONDUCTOR DEVICES STORING SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TRANSPORTING
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Beschreibung
Zusammenfassung:	A mask cassette (100), comprising: a cassette body (10); at least one slot (20) formed in the cassette body (10) and used for placement of a mask (200); and stop blocks (2) provided at the periphery of the slot (20) and used for limiting two ends of the mask (200) placed in the slot (20), wherein on at least one end of the slot, the included angle between the side surface of the stop block (2) opposite the mask and the upper surface of the slot (20) is an obtuse angle. A mask (200) comprises a mask frame; a concave part (201) is provided at the periphery of the mask frame; the concave part (201) is at least provided at a position opposite to the stop block (2) of the mask cassette (100) for placement of a mask; the concave part (201) extends to the top surface of the stop block (2) and the depth of the concave part (201) gradually increases along with the height of the frame. In the process of using a mechanical arm to pick and place a mask (200), the mask cassette (100) and the mask (200) can avoid shaking o