PROCESS PARAMETER-BASED RESULT FEEDBACK METHOD AND APPARATUS

A process parameter-based result feedback method and apparatus. The feedback method comprises: receiving a result feedback request (S1), the feedback request comprising an intermediate result type; obtaining the process parameters corresponding to the feedback request (S2), the process parameters be...

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Hauptverfasser: WANG, Zhenzhong, DU, Dingyi, XIAO, Wei, CHEN, Yong, LIU, Xuesong, LING, Ya, BI, Yu'an, ZHANG, Chenfeng, WANG, Lei, LI, Yerui, CHEN, Yongjie, BAO, Lewei, JIANG, Xiaohong
Format: Patent
Sprache:chi ; eng ; fre
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Zusammenfassung:A process parameter-based result feedback method and apparatus. The feedback method comprises: receiving a result feedback request (S1), the feedback request comprising an intermediate result type; obtaining the process parameters corresponding to the feedback request (S2), the process parameters being multidimensional parameters and constituting a process parameter set; inputting the process parameter set into a result feedback neural network model (S3), the result feedback neural network model being obtained by means of process parameter sample training; and obtaining the output result of the result feedback neural network model (S4). According to the feedback method, by establishing a result feedback neural network model, input parameters in a PKS manufacturing process are classified to determine whether reactants are qualified or not, so as to achieve intelligent feedback. L'invention concerne un procédé et un appareil de rétroaction de résultats basés sur des paramètres de processus. Le procédé de rétroa