METHOD FOR MANUFACTURING DIAMOND SUBSTRATE

The present invention provides a method for efficiently manufacturing a diamond substrate, the method including the following steps: a forming step for forming a diamond layer on a support substrate to form a composite substrate; a processing step for processing the composite substrate at approximat...

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Bibliographische Detailangaben
Hauptverfasser:	IDE, Toshihisa, UMEZAKI, Yosuke, HORIUCHI, Hiroshi, IIZUKA, Sachihiko
Format:	Patent
Sprache:	eng ; fre ; jpn
Schlagworte:	AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUSPOLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE APPARATUS THEREFOR BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL CRYSTAL GROWTH DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE REFINING BY ZONE-MELTING OF MATERIAL SEMICONDUCTOR DEVICES SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE SINGLE-CRYSTAL-GROWTH SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL ORUNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL
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Beschreibung
Zusammenfassung:	The present invention provides a method for efficiently manufacturing a diamond substrate, the method including the following steps: a forming step for forming a diamond layer on a support substrate to form a composite substrate; a processing step for processing the composite substrate at approximately the same temperature as the support substrate in the forming step to form a substrate to be processed; and a separating step for separating the support substrate from the substrate to be processed to obtain a diamond substrate comprising the diamond layer. La présente invention concerne un procédé de fabrication efficace d'un substrat en diamant, le procédé comprenant les étapes suivantes : une étape de formation consistant à former une couche de diamant sur un substrat support pour former un substrat composite; une étape de traitement consistant à traiter le substrat composite à approximativement la même température que le substrat de support dans l'étape de formation pour former un substrat à traiter; et une étape de séparation consistant à séparer le substrat support du substrat à traiter pour obtenir un substrat en diamant comprenant la couche de diamant. 本発明は、以下の各工程を含む、効率的にダイヤモンド基板を製造する方法を提供する：支持基板上にダイヤモンド層を形成して複合基板とする、形成工程；複合基板を、前記形成工程における支持基板と略同一温度下で加工して被加工基板とする、加工工程；被加工基板から支持基板を分離して、ダイヤモンド層からなるダイヤモンド基板を得る、分離工程。