MONOLITHIC CERAMIC GAS DISTRIBUTION PLATE

A monolithic ceramic gas distribution plate for use in a process chamber wherein semiconductor substrates can be processed includes a monolithic ceramic body having an upper surface, a lower surface, and an outer cylindrical surface extending between the upper surface and the lower surface. The lowe...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	TUCKER, Jeremy, LINGAMPALLI, Ramkishan Rao
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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