MEMS MICROPHONE WITH IMPROVED PARTICLE FILTER

A MEMS microphone is provided comprising a carrier board and a MEMS chip mounted thereon over a sound opening. A filter chip comprises a bulk material with an aperture covered and closed by a mesh. The mesh comprises a layer of the filter chip with parallel through-going first holes structured in th...

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Bibliographische Detailangaben
Hauptverfasser:	ROMBACH, Pirmin Hermann Otto, RAVNKILDE, Jan Tue, MORTENSEN, Dennis, RASMUSSEN, Kurt, GINNERUP, Morten
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	BASIC ELECTRIC ELEMENTS DEAF-AID SETS ELECTRIC COMMUNICATION TECHNIQUE ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKEACOUSTIC ELECTROMECHANICAL TRANSDUCERS MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PUBLIC ADDRESS SYSTEMS SEMICONDUCTOR DEVICES TRANSPORTING
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Beschreibung
Zusammenfassung:	A MEMS microphone is provided comprising a carrier board and a MEMS chip mounted thereon over a sound opening. A filter chip comprises a bulk material with an aperture covered and closed by a mesh. The mesh comprises a layer of the filter chip with parallel through-going first holes structured in the layer. The filter chip is arranged in or on the carrier board such that the mesh covers the sound opening. Un microphone MEMS comprend une carte support et une puce MEMS montée sur celle-ci au-dessus d'une ouverture sonore. Une puce de filtre comprend un matériau en vrac avec une ouverture recouverte et fermée par un maillage. Le maillage comprend une couche de la puce de filtre ayant des premiers trous traversants parallèles structurés dans la couche. La puce de filtre est disposée dans ou sur la carte de support de telle sorte que le maillage recouvre l'ouverture sonore.