BROAD BAND PLASMA INSPECTION BASED ON A NUISANCE MAP

A noise map is used for defect detection. One or more measurements of intensities at one or more pixels are received and an intensity statistic is determined for each measurement. The intensity statistics are grouped into at least one region and stored with at least one alignment target. A wafer can...

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Bibliographische Detailangaben

Hauptverfasser:	VEMAREDDY, Kaushik, PERALI, Pavan Kumar, SUMAN, Shishir
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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