MICROPHONE WITH ENCAPSULATED MOVING ELECTRODE

A MEMS microphone system with encapsulated movable electrode is provided. The MEMS microphone system comprises a MEMS sensor having an access channel, a plug, and first and second members. The access channel configured to receive the plug is formed on at least one of the first and second member. A v...

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Bibliographische Detailangaben
Hauptverfasser:	MEISEL, Daniel, RAJARAMAN, Vijaye, REINMUTH, Jochen, GEHL, Bernhard
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	DEAF-AID SETS ELECTRIC COMMUNICATION TECHNIQUE ELECTRICITY LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKEACOUSTIC ELECTROMECHANICAL TRANSDUCERS PUBLIC ADDRESS SYSTEMS
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Beschreibung
Zusammenfassung:	A MEMS microphone system with encapsulated movable electrode is provided. The MEMS microphone system comprises a MEMS sensor having an access channel, a plug, and first and second members. The access channel configured to receive the plug is formed on at least one of the first and second member. A vacuum having a pressure different from a pressure outside the MEMS sensor is formed between the first and second members. L'invention concerne un système de microphone MEMS à électrode mobile encapsulée. Le système de microphone MEMS comprend : un capteur MEMS comportant un canal d'accès; une fiche; et des premier et second éléments. Le canal d'accès conçu pour recevoir la fiche est formé sur au moins un des premier et second éléments. Un vide ayant une pression différente d'une pression à l'extérieur du capteur MEMS est formé entre les premier et second éléments.