ANALYSIS OF MATERIAL LAYERS ON SURFACES, AND RELATED SYSTEMS AND METHODS

Method of analyzing film on a substrate comprises receiving three-dimensional data obtained from measurements of a plurality of pixels on a substrate, the plurality of pixels comprising film layers; extracting a plurality of parameters based on the received three-dimensional data, the plurality of p...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	PARKER, Ian David, CHUN, Doris Pik-Yiu
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL ATOMISING APPARATUS CORRECTION OF TYPOGRAPHICAL ERRORS ELECTRICITY i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME LINING MACHINES NOZZLES PERFORMING OPERATIONS PRINTING SELECTIVE PRINTING MECHANISMS SPRAYING APPARATUS SPRAYING OR ATOMISING IN GENERAL STAMPS TRANSPORTING TYPEWRITERS
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