SEGMENTED TUBES USED IN ANNEALING OF HIGH PURITY SILICON GRANULES

This disclosure concerns embodiments of an annealing device and a method for annealing granular silicon to reduce a hydrogen content of the granular silicon. The annealing device comprises at least one tube through which granular silicon is flowed downwardly. The tube includes a heating zone and (i)...

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Bibliographische Detailangaben
Hauptverfasser:	JULSRUD, Stein, GEERTSEN, Robert, YILMAZ, Sefa, MILLER, Matthew, DESBORDES, Raymond
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	BLASTING CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY CHEMISTRY COMPOUNDS THEREOF DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS,IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KINDOF FURNACE ELECTRIC HEATING ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY ENGINEERING ELEMENTS AND UNITS FURNACES GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS HEATING INORGANIC CHEMISTRY JOINTS OR FITTINGS FOR PIPES KILNS LIGHTING MEANS FOR THERMAL INSULATION IN GENERAL MECHANICAL ENGINEERING METALLURGY NON-METALLIC ELEMENTS OVENS PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL PIPES RETORTS SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING THEIR RELEVANT APPARATUS THERMAL INSULATION IN GENERAL TRANSPORTING WEAPONS
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Beschreibung
Zusammenfassung:	This disclosure concerns embodiments of an annealing device and a method for annealing granular silicon to reduce a hydrogen content of the granular silicon. The annealing device comprises at least one tube through which granular silicon is flowed downwardly. The tube includes a heating zone and (i) a residence zone below the heating zone, (ii) a cooling zone below the heating zone, or (iii) a residence zone below the heating zone and a cooling zone below the residence zone. An inert gas is flowed upwardly through the tube. The tube may be constructed from two or more tube segments. The annealing device may include a plurality of tubes arranged in parallel and housed within a shell. The annealing device and method are suitable for a continuous process. Selon des modes de réalisation, la présente invention concerne un dispositif de recuit et un procédé de recuit de silicium granulaire permettant de réduire la teneur en hydrogène du silicium granulaire. Le dispositif de recuit comprend au moins un tube à travers lequel du silicium granulaire circule vers le bas. Le tube comprend une zone de chauffage et (i) une zone de séjour sous la zone de chauffage, (ii) une zone de refroidissement sous la zone de chauffage, ou (iii) une zone de séjour sous la zone de chauffage et une zone de refroidissement sous la zone de séjour. Un gaz inerte circule vers le haut à travers le tube. Le tube peut être constitué de deux segments de tube ou plus. Le dispositif de recuit peut comprendre une pluralité de tubes agencés en parallèle et logés à l'intérieur d'une coque. Le dispositif et le procédé de recuit sont appropriés pour un traitement continu.