EXTRACTOR ELECTRODE FOR ELECTRON SOURCE

Extractors and extractor systems minimize the generation of secondary electrons which interact with and degrade the primary electron beam. This can improve the performance of an electron beam system, such as a scanning electron microscope. The extractor may include a frustoconical aperture that wide...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	BUI, Daniel, HORDON, Laurence S, JIANG, Xinrong, CUMMINGS, Kevin, CHUBUN, Nikolai, SEARS, Christopher, GRELLA, Luca, FLORENDO, Oscar G
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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