REMOVABLE SUBSTRATE PLANE STRUCTURE RING

An apparatus may include a platen to hold a substrate. A substrate plane structure may be disposed in front of the platen. The substrate plane structure has an opening therein. The apparatus may further include a removable structure disposed in the opening of the substrate plane structure. The remov...

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Bibliographische Detailangaben
Hauptverfasser:	MILLER, Keith A, HERTEL, Richard J, WALLACE, Jay R, ALLEN, Ernest E
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	An apparatus may include a platen to hold a substrate. A substrate plane structure may be disposed in front of the platen. The substrate plane structure has an opening therein. The apparatus may further include a removable structure disposed in the opening of the substrate plane structure. The removable structure may have an opening exposing a surface of the platen. Un appareil peut comprendre un plateau destiné à porter un substrat. Une structure plane pour substrat peut être disposée devant le plateau. Cette structure plane pour substrat comporte une ouverture en son sein. L'appareil peut en outre comprendre une structure amovible disposée dans l'ouverture de la structure plane pour substrat. Cette structure amovible peut comporter une ouverture exposant une surface du plateau.