DIFFRACTION METHOD FOR MEASURING LINEAR SIZE OF OBJECT

The invention relates to monitoring/measurement technology and may be used for measuring the linear (transverse) size of various objects, for instance microwire or fiber, gaps or slits, micro-apertures and round screens having micron-sizes, and also suspensions of microparticles or biological suspen...

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Bibliographische Detailangaben
Hauptverfasser: FEFILOV, Georgij Dmitrievich, KHRAMOV, Valery Yurevich
Format: Patent
Sprache:eng ; fre ; rus
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