INTRODUCTION DEVICE FOR MANUF+ACTURING SILICON SEMICONDUCTOR INGOT, AND DOPING METHOD

An introduction device for manufacturing a silicon semiconductor ingot according to the present invention includes: a body part in which a lower portion thereof is open and an accommodating space is formed inside; and a door part that is provided in the opened lower portion of the body part, and can...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	JEONG, Kwang Pil, CHEE, Bong Sun
Format:	Patent
Sprache:	eng ; fre ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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