CYCLIC ERROR MEASUREMENTS AND CALIBRATION PROCEDURES IN INTERFEROMETERS

There is provided an interferometer system, comprising an heterodyne interferometer and a processing system. The heterodyne interferometer is arranged to provide a reference signal and a measurement signal. The reference signal has a reference phase. The measurement signal has a measurement phase an...

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Bibliographische Detailangaben

Hauptverfasser:	VAN DER PASCH, Engelbertus, Antonius, Fransiscus, COSIJNS, Suzanne, Johanna, Antonetta, Geertruda, JANSEN, Maarten, Jozef
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS TESTING
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